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SpecEl Ellipsometer System
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The SpecEl-2000-VIS Ellipsometer measures polarized light reflected from
the surface of a substrate to determine the thickness and refractive index
of the material as a function of wavelength. The SpecEl is controlled via
a PC. Measure refractive index, absorbance and thickness with the touch of
a button. |
All-in-one Accurate System
The SpecEl houses an integrated light source, a spectrometer and two
polarizers fixed to 70°. It also includes a PC with a 32-bit Windows
operating system. The SpecEl can detect a single layer as thin as 0.1 nm
and up to 5 µm thick. In addition, it can provide refractive indices to
0.005°.
The SpecEl is available for Call for Price.
SpecEl Software and "Recipe" Files
In SpecEl Software, you can configure and save experiment method files for
one-step analysis. after creating a "recipe," you can select the
recipe to execute the experiment.
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This screen shot from the SpecEl
Software demonstrates the Psi and Delta values you can calculate
for thickness, refractive index and absorbance. |
Specifications
| Wavelength
range: |
380-780
nm (standard) or 450-900 nm (optional) |
| Optical
resolution: |
4.0
nm FWHM |
| Accuracy: |
0.1
nm thickness; 0.005% refractive index |
| Angle
of incidence: |
70° |
| Film
thickness: |
1-5000
nm for single transparent film |
| Spot
size: |
2
mm x 4 mm (standard) or 200 µm x 400 µm (optional) |
| Sampling
time: |
3-15
seconds (minimum) |
| Kinetic
logging: |
3
seconds |
| Mechanical
tolerance (height): |
+/-
1.5 mm, angle +/- 1.0° |
| Number
of layers: |
Up
to 32 layers |
| Reference: |
Not
applicable |
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