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Ocean Optics Introduces Line of High-precision Metrology ToolsCompany Expands Product Line with Systems for Thin Film Measurement and Plasma Analysis
Dunedin, Fla., May 2004 –
A leading supplier of optical-sensing systems and accessories has
introduced a line of high-precision metrology tools for thin film
measurement, plasma analysis and optics characterization. Ocean Optics,
which pioneered the development of miniature fiber optic spectrometers,
will now provide fully integrated metrology systems complemented by
sophisticated software and applications database support.
Among the turnkey metrology systems Ocean Optics now offers are PlasCalc,
an optical emission spectrometer and control system for monitoring and
controlling plasma processes; SpecEl, an ellipsometry tool for analyzing
the thickness of optical layers from 10 nm to 250 microns; and the LTP
Long Trace Profilometer, an interferometric optical profiling instrument
for absolute figure measurement of optical components up to 1500 mm in
diameter.
Ocean Analytics, a division
of Ocean Optics recently created to serve
customers of the company’s most sophisticated application-specific,
turnkey systems, will support the metrology product line with
customer visits, on-site demonstrations and seminars. Each
of the new metrology products incorporates Ocean Optics’ miniature fiber
optic spectroscopy technology. The combination of this CCD-array
technology, optically innovative engineering and powerful software yields
turnkey metrology systems for high-precision optical and thin film
analysis.
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