Ocean Optics - Inventor of the World's First Miniature Spectrometer
Ocean Optics - Inventor of the World's First Miniature Spectrometer
Ocean Optics - Inventor of the World's First Miniature Spectrometer
SpecEl Ellipsometer System
The SpecEl-2000-VIS Ellipsometer measures polarized light reflected from
the surface of a substrate to determine the thickness and refractive index
of the material as a function of wavelength. The SpecEl is controlled via
a PC. Measure refractive index, absorbance and thickness with the touch of
a button.
All-in-one Accurate System
The SpecEl houses an integrated light source, a spectrometer and two
polarizers fixed to 70°. It also includes a PC with a 32-bit Windows
operating system. The SpecEl can detect a single layer as thin as 0.1 nm
and up to 5 µm thick. In addition, it can provide refractive indices to
0.005°.
SpecEl Software and "Recipe" Files
In SpecEl Software, you can configure and save experiment method files for
one-step analysis. after creating a "recipe," you can select the
recipe to execute the experiment.
This screen shot from the SpecEl
Software demonstrates the Psi and Delta values you can calculate
for thickness, refractive index and absorbance.
Specifications
Wavelength
range:
380-780
nm (standard) or 450-900 nm (optional)
Optical
resolution:
4.0
nm FWHM
Accuracy:
0.1
nm thickness; 0.005% refractive index
Angle
of incidence:
70°
Film
thickness:
1-5000
nm for single transparent film
Spot
size:
2
mm x 4 mm (standard) or 200 µm x 400 µm (optional)
The SpecEl-2000-VIS Ellipsometer measures polarized light reflected from
the surface of a substrate to determine the thickness and refractive index
of the material as a function of wavelength. The SpecEl is controlled via
a PC. Measure refractive index, absorbance and thickness with the touch of
a button.
