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Vacuum Feed ThroughsThe Ocean Optics VFT Vacuum Feed Through
channels light into or out of a vacuum chamber for a variety of ultra-high
vacuum applications, including optical monitoring in semiconductor
processing and endpoint
Available for $299, the VFT contains a robust novel metal-to-glass seal that improves the VFT's performance in ultra-high vacuum applications. Each VFT is tested and certified to 10-10 Torr and operates to 350 °C. In addition to the VFT's usefulness in semiconductor and thin films processing, the VFT is ideal for applications involving environmental testing, pharmaceutical processing and optical coatings production. It can also be used in molecular beam epitaxy and chemical and physical vapor deposition, and is perfect as a general-purpose penetrator for NEMA enclosures, glove boxes and moderate-pressure installations. The VFT's high- and low-pressure sides are terminated to an SMA 905 Connector and couples easily to optical fibers and Ocean Optics' extensive line of light sources, miniature fiber optic spectrometers and accessories. The VFT can be screwed into a 3/8-24 external threaded hole in the vacuum chamber, or can be bolted into a smooth hole with the provided nut and washer. Setting up is as simple as attaching an optical fiber to the VFT using a 21-02 Splice Bushing. Optional aluminum-jacketed or armored-cable optical fiber assemblies are recommended for the low-pressure side of the chamber. Vacuum Feed Throughs are available in optical fiber diameters of 200, 400, 600 and 1000 µm diameters. Each VFT includes two 21-02 SMA Splice Bushings -- an inline adapter that mates SMA 905 Connectors
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detection of thin film deposition.
