Spectroscopy Solutions for
Semiconductor Manufacturing
Semiconductor processes demand repeatable, real-time insight. Optical Emission Spectroscopy enables precise monitoring designed for uptime, consistency, and scale without disrupting existing tools.
The Challenges in
Semiconductor Manufacturing
See How Spectroscopy Helps
Unplanned downtime and yield loss during plasma processes
Inconsistent process repeatability across etch and deposition steps
Difficulty detecting endpoint or plasma drift in real time
Tight integration requirements inside existing process tools
How Spectroscopy Improves Semiconductor Manufacturing
End Point Detection
- What You Measure
Real-time plasma emission spectra during etching or deposition. - What You Learn
Clear spectral signals that indicate process completion. - Why It Matters
Reduces over-processing, improves cycle consistency, and lowers process risk.
Process Control
- What You Measure
Continuous changes in plasma emission behavior. - What You Learn
Process drift, instability, or variation as it occurs. - Why It Matters
Supports tighter process control without disrupting existing tool architectures.
Why Ocean Optics
Closed systems force you to adapt your process around the instrument. Ocean Optics takes the opposite approach. Our spectroscopy solutions are designed to fit into your tool architecture, your control environment, and your performance targets.
- Flexible by design – Configure wavelength range, resolution, optics, and accessories around your specific process signals.
- Built for integration – Compact, modular components designed for OEM integration and existing tool environments
- Open-platform control – Use OceanDirect™ SDK for full software and automation control
- Scale without re-platforming – Move from R&D to production using the same ecosystem. No need to redesign your sensing approach
- Cost aligned to the application – Build exactly what you need, without paying for fixed-system limitations or unnecessary complexity
Deployed Across Global Semiconductor Ecosystems
Ocean Optics spectroscopy solutions have been delivered into a global process control OEM, embedding high-resolution spectroscopy into overlay metrology systems, and integrated directly into semiconductor process control equipment.
The Cost of Delay is Too High
Every delay risks wasted resources, missed opportunities, and lost market share. Semiconductor manufacturers who streamline integration will win first-to-market advantage. Don’t let integration challenges hold back your innovation.