ADP-84UV-CF25
Product Details
The ADP-84UV-CF25 adapter securely mounts the 84-UV-25 collimating lens to CF25 vacuum chamber viewports. Its adjustable design enables optical alignment through a fixed viewport, allowing emission signals to be collected from different regions within the chamber. This flexibility supports optical emission spectroscopy (OES), endpoint detection, and semiconductor process monitoring where observation angle can impact measurement results.
Standard models fit CF25 viewports, with custom configurations available for other CF flange sizes.
Product Overview
Compatible Lens
84-UV-25
Flange Size
CF25
Applications and Measurement Type
Plasma Monitoring, OES/UV Emission Monitoring
Why Use the ADP-84-UV-CF25 Adapter?
Designed for CF25 Viewports
Provides a dedicated mounting solution for standard CF25 chamber ports.
Optimized for the 84-UV-25 Lens
Interfaces directly with the 84-UV-25 collimating lens for efficient light collection.
Simplifies System Integration
Creates a robust mechanical connection between the optical assembly and process chamber.
Supports Plasma Process Monitoring
Ideal for optical emission spectroscopy and endpoint detection applications.
Engineering Specifications
| Part Number | ADP-84UV-CF25 |
| Compatible Lens | 84-UV-25 collimating lens |
| Material | 304 stainless steel |
| Viewport Compatibility | CF25 Flange |
| Viewing Angle Adjustment | 0° to 15° |
| Primary Application | Plasma Chamber Monitoring |
| Compatible Measurements | OES, Endpoint Detection, UV Emission Monitoring |
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